哪位大侠能发份电子版的文章: http://www.iop.org/EJ/abstract/0960-1317/12/6/306
Characterization of the mechanical behavior of an electrically actuated
microbeam
Eihab M Abdel-Rahman et al 2002 J. Micromech. Microeng. 12 759-766 doi: 10
.1088/0960-1317/12/6/306
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