m*******r
发帖数: 481 | | H*****l
发帖数: 702 | 2 why do you need books for PECVD?
what is the purpose?
with certain purpose disclosed, people may help you better
【在 m*******r 的大作中提到】
: 不知侧重点有什么不一样。
: 谢谢
| m*******r
发帖数: 481 | 3 谢谢。在太阳能板沉积镀膜方面，尤其是非晶体硅。
【在 H*****l 的大作中提到】
: why do you need books for PECVD?
: what is the purpose?
: with certain purpose disclosed, people may help you better
| H*****l
发帖数: 702 | 4 well
reading papers seems to be the only way for your specific purpose....
I do not think you can find a proper PECVD book suits you well in this topic
... | H*****l
发帖数: 702 | 5 actually,I could only give some leads
there are books you could download on internet
however, they are CVD books, not focusing on PECVD or thin film solar
cell
Handbook of chemical vapor deposition--Principles,technology and
applications
by Hugh O.Pierson (retired from Sandia)
Handbook of deposition technologies for films and coatings--Science,
Technology and applications
by Rointan F.Bunshah(UCLA)
Handbook of plasma processing technology
by Rossnagel (IBM T.J.Watson), Cuomo(T.J.Watson) and Wes
【在 m*******r 的大作中提到】
: 谢谢。在太阳能板沉积镀膜方面，尤其是非晶体硅。
| y*p
发帖数: 47 | 6 你平常怎么做DOE的呢?
一般输入,输出多少因素,取多少水平?
希望能多多交流.
【在 H*****l 的大作中提到】
: actually,I could only give some leads
: there are books you could download on internet
: however, they are CVD books, not focusing on PECVD or thin film solar
: cell
: Handbook of chemical vapor deposition--Principles,technology and
: applications
: by Hugh O.Pierson (retired from Sandia)
: Handbook of deposition technologies for films and coatings--Science,
: Technology and applications
: by Rointan F.Bunshah(UCLA)
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