c*******n
发帖数: 10 | 1 want to use solution cast to make very flat surface film with thickness 2-15
um. get good results in wafer by spin coating in clean room. but poor results
in cleaned ordinary glass.
Does anyone know whether there is special glass which has low surface
roughness? or any other relatively cheap substrate for this purpose?
Thanks! |
m*******e
发帖数: 119 | 2 You can buy some cheap pyrex glass wafers which has very flat surface
results
【在 c*******n 的大作中提到】
: want to use solution cast to make very flat surface film with thickness 2-15
: um. get good results in wafer by spin coating in clean room. but poor results
: in cleaned ordinary glass.
: Does anyone know whether there is special glass which has low surface
: roughness? or any other relatively cheap substrate for this purpose?
: Thanks!
|
e****s
发帖数: 23 | 3 glass wafers
for example this one:
http://www.sydor.com/pricing.htm
results
【在 c*******n 的大作中提到】
: want to use solution cast to make very flat surface film with thickness 2-15
: um. get good results in wafer by spin coating in clean room. but poor results
: in cleaned ordinary glass.
: Does anyone know whether there is special glass which has low surface
: roughness? or any other relatively cheap substrate for this purpose?
: Thanks!
|
c**********e
发帖数: 5 | 4 try mica if you don't mind its slightly pink color.
peel off a thin sheet right before use, don't have to do any cleaning, just do
your casting on the freshly exposed surface, it's flat at atomic level.
AND, it's dirt cheap.
results
【在 c*******n 的大作中提到】
: want to use solution cast to make very flat surface film with thickness 2-15
: um. get good results in wafer by spin coating in clean room. but poor results
: in cleaned ordinary glass.
: Does anyone know whether there is special glass which has low surface
: roughness? or any other relatively cheap substrate for this purpose?
: Thanks!
|
