c***y
发帖数: 233 | 1 电阻很大，〉1000欧
请问是什么原因呢？大家畅所欲言
多谢！ | T********k
发帖数: 94 | 2 i have some experience on e-beam ito coating.
A company uses e-beam method to coat ITO on a 1x6 mm device, estimated
thickness 0.15micron. I measured resistance by two probes of a multimeter.
sometimes, I got ~ 100ohm, sometimes, I got much higher resistance.I do not know how uniform your coating is? What is the thickness of your coating?
Other observations:
I f you did not clean the target substrate well, the coating might flake off.
The coating sometimes looks yellowish, sometimes transparent. I do not why either.
I have a question for you, in the dc sputtering ito process, what is the temperature of the target? | T********k
发帖数: 94 | 3 Just find out e-beam deposited ito show much less resistivity compared to
sputter-deposited ito
http://scitation.aip.org/getabs/servlet/GetabsServlet?prog=norm
【在 c***y 的大作中提到】
: 电阻很大，〉1000欧
: 请问是什么原因呢？大家畅所欲言
: 多谢！
| z*******r
发帖数: 113 | | c***y
发帖数: 233 | 5 thinkness 150 nm
room temp
not know how uniform your coating is? What is the thickness of your coating?
off.
either.
temperature of the target?
【在 T********k 的大作中提到】
: i have some experience on e-beam ito coating.
: A company uses e-beam method to coat ITO on a 1x6 mm device, estimated
: thickness 0.15micron. I measured resistance by two probes of a multimeter.
: sometimes, I got ~ 100ohm, sometimes, I got much higher resistance.I do not know how uniform your coating is? What is the thickness of your coating?
: Other observations:
: I f you did not clean the target substrate well, the coating might flake off.
: The coating sometimes looks yellowish, sometimes transparent. I do not why either.
: I have a question for you, in the dc sputtering ito process, what is the temperature of the target?
| c***y
发帖数: 233 | 6 ~50:2
【在 z*******r 的大作中提到】
: 颜色和厚度有关，
: 你Ar O2 flow是多少
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