o**o
发帖数: 10 | 1 all of the recipes I found online react with PMMA much faster than Cu and Ag.
Who knows how to make patterns on Cu film? I choose EBL. Is there any
other better method? The line with is about 100 nm to 1000 nm. Can you
contact with me via mitbbs email? Thanks so much! |
j**y
发帖数: 7014 | 2 估计你得先liftoff一下了
Ag.
【在 o**o 的大作中提到】
: all of the recipes I found online react with PMMA much faster than Cu and Ag.
: Who knows how to make patterns on Cu film? I choose EBL. Is there any
: other better method? The line with is about 100 nm to 1000 nm. Can you
: contact with me via mitbbs email? Thanks so much!
|
o**o
发帖数: 10 | 3 How to do that? Can you tell me that in details?
Thank you very much
【在 j**y 的大作中提到】
: 估计你得先liftoff一下了
:
: Ag.
|
o**o
发帖数: 10 | 4 Who can solve this proble? I give you all of my mitbbs money including all
of my ids.
【在 o**o 的大作中提到】
: How to do that? Can you tell me that in details?
: Thank you very much
|
r*********e
发帖数: 281 | 5 how thick is ur metal film?
three possible solutions:
1. do liftoff
2. use ZEP resist which has a much better dry etch resistance than the PMMA
3. use a dielectric, say SiO2 to transfer the pattern
good luck
【 ?OdbO (断电中) 的大作中提到: 】
all |
