z**h
发帖数: 224 | | l*****o
发帖数: 82 | 2 Because:
1.I can not operate it by myself. There is no AFM in my lab.
2. Do u think a series of PMMA lines with 60 nm width by 50 nm height
seperated by 50 nm- wide spaces can be scaned by AFM? (the edges are
very sharp)
【在 z**h 的大作中提到】
:
: lower
| x****r
发帖数: 236 | 3 definately!
【在 l*****o 的大作中提到】
: Because:
: 1.I can not operate it by myself. There is no AFM in my lab.
: 2. Do u think a series of PMMA lines with 60 nm width by 50 nm height
: seperated by 50 nm- wide spaces can be scaned by AFM? (the edges are
: very sharp)
| l*****o
发帖数: 82 | 4 \Sigh!
It seems I should look for some express way to access AFM now.
【在 x****r 的大作中提到】
: definately!
| r******0
发帖数: 2753 | 5
So, you did 100nm period grating PMMA line. Guess done by nanoimprint or EPL,
right?
First, check if it is still 100nm period. if not, God! you absolutely find
something new. If the edges are still sharp, I would say no decomposition,
although PMMA is easy to decompose under e-beam. The most possible reason, I
think, is you didn't check exactly the same place in two scans. Just do the
SEM again and check more places to see if all the lines are swollen. It is
normal that those long lines are not
【在 l*****o 的大作中提到】
: \Sigh!
: It seems I should look for some express way to access AFM now.
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