z**h
发帖数: 224 | 1 【 以下文字转载自 Chemistry 讨论区,原文如下 】
发信人: zzwh (小楼昨夜又东风), 信区: Chemistry
标 题: 请问ellipsometry 测膜厚度最厚能测到多少？
发信站: Unknown Space - 未名空间 (Thu Jan 22 14:37:57 2004) WWW-POST
Thanks. | m*******r
发帖数: 66 | 2 I only know that the minimum can be about 0.1nm...
for the maxmum... do not know.
【在 z**h 的大作中提到】
: 【 以下文字转载自 Chemistry 讨论区,原文如下 】
: 发信人: zzwh (小楼昨夜又东风), 信区: Chemistry
: 标 题: 请问ellipsometry 测膜厚度最厚能测到多少？
: 发信站: Unknown Space - 未名空间 (Thu Jan 22 14:37:57 2004) WWW-POST
: Thanks.
| l*****o
发帖数: 82 | 3 It's theoretical limit is limited by the coherence of
the light source. Use He-Ne laser, you can measure very
thick film - as long as it's optical flat
【在 m*******r 的大作中提到】
: I only know that the minimum can be about 0.1nm...
: for the maxmum... do not know.
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