p*q 发帖数: 7 | 1 为什么不用polyimide,PMMA(polymethyl-methacrylate),这些应该是MEMS/lithograp
hy里广泛使用的微模材料吧? |
w********h 发帖数: 12367 | 2 yeah...I thought of them...
but he mentioned very high strength.
and I don't know if PI and PMMA dissolve in dimethyl benzene or not.
为什么不用polyimide,PMMA(polymethyl-methacrylate),这些应该是MEMS/lithograp
【在 p*q 的大作中提到】![](/moin_static193/solenoid/img/up.png) : 为什么不用polyimide,PMMA(polymethyl-methacrylate),这些应该是MEMS/lithograp : hy里广泛使用的微模材料吧?
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l*****o 发帖数: 82 | 3 PMMA is way too soft. I haven't tried Polyimide but someone told me
it may form wavy surface.
【在 p*q 的大作中提到】![](/moin_static193/solenoid/img/up.png) : 为什么不用polyimide,PMMA(polymethyl-methacrylate),这些应该是MEMS/lithograp : hy里广泛使用的微模材料吧?
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p*q 发帖数: 7 | 4 我觉得PI和PMMA的强度在电镀过程中没问题,但是不知道它们用在reactive ion
etching制模时能否达到lorenzo所要求的tolerance。
为什么不用polyimide,PMMA(polymethyl-methacrylate),这些应该是MEMS/lithograp
【在 w********h 的大作中提到】![](/moin_static193/solenoid/img/up.png) : yeah...I thought of them... : but he mentioned very high strength. : and I don't know if PI and PMMA dissolve in dimethyl benzene or not. : : 为什么不用polyimide,PMMA(polymethyl-methacrylate),这些应该是MEMS/lithograp
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